Resonance control of membrane reflectors with effective index engineering

Document Type

Article

Source Publication Title

Applied Physics Letters

First Page

23110

Abstract

We report here broadband membrane reflectors based on Fano resonances in patterned silicon nanomembranes. Resonance control of the reflectors was realized either by partially removing buried oxide layer underneath the device layer or by controlled SiO2 film deposition on top of the devices. Both blueshifts and redshifts were demonstrated with a turning range of 50 nm for a center wavelength of 1550 nm. These results demonstrate practical postprocess means for Fano resonance engineering for both narrowband filters and ultracompact broadband reflectors. © 2009 American Institute of Physics.

Disciplines

Electrical and Computer Engineering | Engineering

Publication Date

7-14-2009

Language

English

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