Coupled Bilayer Photonic Crystal Slab Electro-Optic Spatial Light Modulators

Document Type

Article

Source Publication Title

IEEE Photonics Journal

First Page

1

Last Page

12

DOI

http://dx.doi.org/10.1109/JPHOT.2017.2675619

Abstract

We demonstrate here a surface-normal ultracompact Fano resonance electro-optic spatial light modulator employing a stacked photonic crystal membrane capacitor-like structure. Vertically coupled optical resonance near 1.5 μm was observed, and both blue and red spectral shifts were achieved by means of appropriate electrical bias. A 200-MHz modulation bandwidth was obtained on a device with an 80 μm × 80 μm mesa area, while bandwidths in the gigahertz range are expected by shrinking the mesa lateral size down to 20 μm × 20 μm. We fabricated 6 × 6 arrays with different mesa sizes on a silicon-on-insulator platform, illustrating the potential of these devices in vertically integrated photonic technologies and for high-speed spatial light modulations.

Disciplines

Electrical and Computer Engineering | Engineering

Publication Date

3-1-2017

Language

English

Comments

Article 7101411

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