Ashutosh Kole

Graduation Semester and Year

2005

Language

English

Document Type

Thesis

Degree Name

Master of Science in Mechanical Engineering

Department

Mechanical and Aerospace Engineering

First Advisor

Dereje Agonafer

Abstract

This thesis presents the design, analysis, and fabrication of a novel polymer tube embedded in-plane micropump. The key component of the proposed micropump is a Parylene polymer tube that is embedded into the trench of a silicon die. Advantages of embedding a Parylene polymer tube are biocompatibility and leakage free environments. The issue of leakage of fluid presented in [1] is eliminated by inserting the polymer tube. The tube itself acts as a diaphragm, which transfers the force and motion of thermal actuators to fluid. The structural analysis and the fabrication of the Parylene tube along with the coupled-field multiphysics analysis of the electrothermal actuators are the challenging tasks involved. Compression ratio is computed, which determines the flow rate, and backpressure. 4 mm thick Parylene is conformally deposited on the nickel coated DRIE processed silicon wafer, and peeled off and two Parylene layers are bonded together to form a tube.

Disciplines

Aerospace Engineering | Engineering | Mechanical Engineering

Comments

Degree granted by The University of Texas at Arlington

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