Graduation Semester and Year

2016

Language

English

Document Type

Thesis

Degree Name

Master of Science in Mechanical Engineering

Department

Mechanical and Aerospace Engineering

First Advisor

Hyejin Moon

Abstract

Through this research, fabrication, calibration and characterization of micro-scale Resistance Temperature Detector (RTD) were studied. The RTD is meant to sense the temperature at the micro scale level on the hot spot of integrated circuit devices. Material that we focused in this study was indium tin oxide (ITO). Indium tin oxide thin films are widely used as an electrode owing to its optically transparent and electrical conducting properties. However, ITO thin film behavior as an RTD has not been well studied yet, which we aimed in this study. The commercially available ITO thin film deposited on a glass substrate was used in all the experiments. In addition, nickel which has a very linear temperature v/s resistance characteristic was also fabricated for comparison purpose. Nickel and ITO resistors were fabricated by standard microfabrication processes. Oil bath calibration process was implemented to maintain steady state temperature. The effect of annealing on the change in resistance of both ITO and nickel was studied. Experiments were carried out in different temperature ranges to validate the data. The study concludes that ITO thin film can be used as an RTD in a limited temperature range and its performance is highly affected by crystalline structure of ITO thin film layer.

Keywords

Characterization, MEMS fabrication, Calibration, RTD, ITO

Disciplines

Aerospace Engineering | Engineering | Mechanical Engineering

Comments

Degree granted by The University of Texas at Arlington

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